Nanotechnology Courses offered at the University of Illinois

Courses with an "on nanohub" indication offer some aspect of the course online at This component may be in the form of videos of the lectures, class homework, or pdfs of the lectures.


Illinois MatSE485/Phys466/CSE485 - Atomic-Scale Simulation
The objective is to learn and apply fundamental techniques used in (primarily classical) simulations in order to help understand and predict properties of microscopic systems in materials science, physics, chemistry, and biology.

Mechanical Engineering

ME 498NF: Introduction of Nano Science and Technology
Introduction to Nano Science and Technology This new elective course is intended to be a gateway for the senior and graduate students to the range of special graduate courses in nanoscience and technology for engineers.

Department of Physics

PHYS 498: Introduction to Biological Physics
We will apply simple yet powerful ideas of physics to gain some understanding of biology. (What is the inertia of a bacteria and how does this affect its behavior?) We will begin with atoms, move to molecules, then macromolecules, then cells, and finally whole systems. For example, how do we see? The answer: photons cause the release of chemicals that create electricity.

PHYS 550: Molecular Biophysics
Physical concepts governing the structure and function of biological macromolecules; general properties, spatial structure, energy levels, dynamics and functions, and relation to other complex physical systems such as glasses; recent research in biomolecular physics; physical techniques and concepts from theoretical physics emphasized. Designed for students without appreciable background in biology and chemistry.

College of Electrical and Computer Engineering

ECE 498AL: Programming Massively Parallel Processors
The aim of this course is to provide students with knowledge and hands-on experience in developing applications software for processors with massively parallel computing resources. In general, we refer to a processor as massively parallel if it has the ability to complete more than 64 arithmetic operations per clock cycle.

ECE 485 - Introduction to Microelectromechanical Devices and Systems Presents an introduction to the principles, fabrication techniques, and applications of microelectromechanical systems (MEMS). Gives an in-depth understanding of sensors and actuator principles and integrated microfabrication techniques for MEMS. It also consists of a comprehensive investigation of the state-of-the-art MEMS devices and systems.

ECE 590 G - Seminar: Microelectronics II Lectures and discussions on current research and literature on advanced topics in electrical engineering. Approved for S/U grading only. May be repeated.
Prerequisite: Consent of instructor.

ECE 498 JL3 - Nanotechnology This course begins by covering the fundamental physical properties of nanoscale systems. Nanofabrication techniques will then be covered, followed by coverage of topics including semiconductor nanotechnology, molecular and biomolecular nanotechnology, carbon nanotechnology (nanotubes and graphene), nanowires, and nanoscale architectures and systems. Student course work will consist of weekly homework assignments, one in-class Powerpoint presentation, a term paper and a final research proposal.

ECE 398 JC - Introduction to Electronic and Photonic Devices The mobile phone and its associated information distribution systems are used to provide a framework for the study of semiconductor materials and devices. Selected components within the cell phone will be broken down into functional block diagrams, common circuit elements, and finally individual active devices. The core elements of all semiconductor electronic and photonic devices semiconductor materials and the pn junction diode will be studied in detail. Armed with a solid understanding of the energy band structure and electrical characteristics of the diode, a student can understand the structure and operation of any active semiconductor device. These devices will include bipolar transistors, field effect and MOS transistors, integrated circuits, solar cells, lasers and LEDs, modulators, and photodetectors.

ECE 583 - Semiconductor Nanotech Lab A lab course treating the practical aspects of design and testing of nanometer-scale, MOS circuit technology. Emphasis on process integration and the interrelationship between the process flow and device/circuit performance. Experience with state-of-the-art, process and device simulation tools; nanostructure characterization using atomic force and transmission electron microscopies; and capacitance, conductance and scattering parameter measurements used to extract parameters for circuit models.

ECE 598EP: Hot Chips: Atoms to Heat Sinks
This course pursues a parallel treatment of electrical and thermal issues in modern nanoelectronics, from fundamentals to system-level issues. Topics include energy transfer through electrons and phonons, mobility and thermal conductivity, power dissipation in modern devices (CMOS, phase-change memory, nanowires, nanotubes), circuit leakage, thermal breakdown, system-level issues, thermometry, and heat sinks.

ECE 598 KJ - Microlithography: Science, Technology, and Applications This course will provide a comprehensive foundation in the broad field of micro/nanolithography for graduate students in varied research areas. Lithography is the central process technology used in fabrication of a vast array of micro/nano structures required in microelectronic devices, displays, flexible electronics, microelectromechanical systems, and biotechnology. The course will cover the science of microlithography, including optical imaging, photochemistry, and materials issues; the extensive technological developments, including state-of-the-art commercial lithography systems; and the innumerable applications of lithography in diverse fields.

ECE 598 KC - Nano-Photonics Nanophotonics defined as the fusion between nanotechnology and photonics, is an emerging contemporary area of research with new applications. This course will examine the quantum mechanical interaction between light and matter, with a focus on the fundamentals of the optical properties of nanometer scale structures of semiconductors, metals, and composites. Nanoscale optical phenomena such as plasmonics, cavity electrodynamics, sub-wavelength gratings, and meta-materials will be examined.